Pages 803–807 from the book:

Near Infrared Spectroscopy: Proceedings of the 14th International Conference

ISBN: 978-1-906715-03-8

In-line monitoring of the thickness of silica and silazane layers in the submicron range by NIR reflection spectroscopy

T. Scherzer, K. Heymann, G. Mirschel and L. Prager

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